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STACIS SEM-Base active hard-mount floor platform is compatible with internal vibration systems of all commercial SEMS. With vibration cancellation starting below 1 Hz., it allows floor to meet tool vibration specification. It has no soft air suspension. The compact system can support 900 to 2,500... more
Technical Manufacturing Corporation
TMC designs and manufactures precision vibration isolation systems for sensitive research and manufacturing processes worldwide. The ISO 9001:2008-certified company's products are industry standards in semiconductor manufacturing, life sciences and... more
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