STACIS SEM-Base active hard-mount floor platform is compatible with internal vibration systems of all commercial SEMS. With vibration cancellation starting below 1 Hz., it allows floor to meet tool vibration specification. It has no soft air suspension. The compact system can support 900 to 2,500 pounds and installs easily with minimal tuning required.
TMC designs and manufactures precision vibration isolation systems for sensitive research and manufacturing processes worldwide. The ISO 9001:2008-certified company's products are industry standards in semiconductor manufacturing, life sciences and photonics, and are also used in academic, industrial and military applications
View all resources from this company