Fab Facilities
Discover free resources on fab facility topics, including gas management, chemical management, waster treatment & more. The Semiconductor International Resource Center is comprised of white papers, research, tutorials, product guides & case studies.
Resources 1 - 1 of 1 for “Fab Facilities”
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STACIS® SEM-Base™ Active Vibration Cancellation Floor Platform for Scanning Electron Microscopes
Technical Manufacturing Corporation
Data Sheet: STACIS SEM-Base active hard-mount floor platform is compatible with internal vibration systems of all commercial SEMS. With vibration cancellation starting below 1 Hz., it allows floor to meet tool vibration specification. It has no soft air suspension. The compact system can support 900 to 2,500... more
Resources 1 - 1 of 1 for “Fab Facilities”
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