TMC designs and manufactures precision vibration isolation systems for sensitive research and manufacturing processes worldwide. The ISO 9001:2008-certified company's products are industry standards in semiconductor manufacturing, life sciences and photonics, and are also used in academic, industrial and military applications
Data Sheet: STACIS SEM-Base active hard-mount floor platform is compatible with internal vibration systems of all commercial SEMS. With vibration cancellation starting below 1 Hz., it allows floor to meet tool vibration specification. It has no soft air suspension. The compact system can support 900 to 2,500... more